Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection
A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed.The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall.Different from traditional PA sensors, the designed low-power sensor ha